Thin semiconductor package

ABSTRACT

A semiconductor package includes; a lower connection structure, a semiconductor chip on the lower connection structure, an intermediate connection structure on the lower connection structure, a sealing layer covering the semiconductor chip, and an upper connection structure including a first upper insulating layer on the sealing layer, a first upper conductive pattern layer on the first upper insulating layer, and a first upper via penetrating the first upper insulating layer to directly connect the first upper conductive pattern layer to the intermediate connection structure. A height from an upper surface of the lower connection structure to an upper surface of the sealing layer is less than or equal to a maximum height from the upper surface of the lower connection structure to an upper surface of the intermediate connection structure.

CROSS-REFERENCE TO RELATED APPLICATION

This is a Continuation of U.S. application Ser. No. 16/916,678, filed Jun. 30, 2020, which claims the benefit of Korean Patent Application No. 10-2020-0000485, filed on Jan. 2, 2020 in the Korean Intellectual Property Office, the subject matter of which is hereby incorporated by reference.

BACKGROUND

The inventive concept relates to semiconductor packages. More particularly, the inventive concept relates to fan-out type semiconductor packages.

Improvement in the performance of a semiconductor package may be realized by increasing the number of its external connection terminals. However, increasing the number of external connection terminals generally increases the planar area occupied by the semiconductor package. Yet, reduction in the manufacturing costs of a semiconductor package may be realized by reducing the planar area and overall size of the semiconductor package. However, efforts to reduce the size of a semiconductor chip must ensure a sufficiently large planar area to accommodate an increased number of external connection terminals. A fan-out package connecting the semiconductor chip to the external connection terminals may be used to effectively provide a planar area for connecting external connection terminals that is greater than the planar area of the semiconductor chip.

SUMMARY

The inventive concept provides semiconductor packages including an upper connection structure of high pattern density, and yet having a relatively thin thickness and reduced manufacturing cost.

According to an embodiment of the inventive concept, there is provided a semiconductor package including; a lower connection structure; a semiconductor chip on an upper surface of the lower connection structure, an intermediate connection structure on the upper surface of the lower connection structure, a sealing layer covering an upper surface of the semiconductor chip, and an upper connection structure including a first upper insulating layer on an upper surface of the sealing layer, a first upper conductive pattern layer on an upper surface of the first upper insulating layer, and a first upper via penetrating the first upper insulating layer to directly connect the first upper conductive pattern layer to the intermediate connection structure, wherein a height from the upper surface of the lower connection structure to the upper surface of the sealing layer may be less than or equal to a maximum height from the upper surface of the lower connection structure to an upper surface of the intermediate connection structure.

According to another embodiment of the inventive concept, there is provided a semiconductor package including; a lower semiconductor package, an upper semiconductor package on the lower semiconductor package, and an inter-package connection member between the lower semiconductor package and the upper semiconductor package, wherein the lower semiconductor package includes; a first connection structure, a first semiconductor chip on the first connection structure, a second connection structure on the of the first connection structure, a first sealing layer on the first semiconductor chip, and a third connection structure including an insulating layer on the first sealing layer and the second connection structure, a conductive pattern layer on the insulating layer, and a via penetrating the insulating layer and having an upper end in contact with conductive pattern layer and a lower end in contact with the second connection structure, a length from the lower end of the via to the upper end of the via is less than or equal to a maximum thickness of the insulating layer, the upper semiconductor package includes: a fourth connection structure; a second semiconductor chip on the fourth connection structure; and a second sealing layer on the fourth connection structure and the second semiconductor chip, and the inter-package connection member connects the conductive pattern layer of the third connection structure to the fourth connection structure.

According to another embodiment of the inventive concept, there is provided a semiconductor package including; a semiconductor chip, an intermediate connection structure including an intermediate insulating layer around the semiconductor chip, an intermediate conductive pattern layer on the intermediate insulating layer, and an intermediate via penetrating the intermediate insulating layer to be connected to the intermediate conductive pattern layer, a lower connection structure including a lower insulating layer on a lower surface of the semiconductor chip and a lower surface of the intermediate connection structure, a lower via penetrating the lower insulating layer to be connected to the intermediate via, and a lower pad disposed on a lower surface of the lower insulating layer and connected to the lower via; an external connection terminal on a lower surface of the lower pad, a sealing layer covering an upper surface of the semiconductor chip and exposing the intermediate conductive pattern layer, and an upper connection structure including a first upper insulating layer on the sealing layer, a first upper conductive pattern layer on the first upper insulating layer, and a first upper via penetrating the first upper insulating layer to connect the first upper conductive pattern layer to the intermediate conductive pattern layer, wherein an upper surface of the intermediate conductive pattern layer is coplanar with an upper surface of the sealing layer or protrudes upward from the upper surface of the sealing layer.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the inventive concept will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings in which:

FIGS. 1, 2, 3, 4, 5, and 6 are respective cross-sectional views of semiconductor packages according to embodiments of the inventive concept;

FIGS. 7A to 7F are related, cross-sectional views further illustrating a method of manufacturing a semiconductor package according to embodiments of the inventive concept; and

FIGS. 8A to 8E are related, cross-sectional views further illustrating a method of manufacturing a semiconductor package according to embodiments of the inventive concept.

DETAILED DESCRIPTION

Certain embodiments of the inventive concept will now be described in some additional detail with reference to the accompanying drawings. Throughout the written description and drawings, like reference numbers and labels are used to denote like or similar elements.

Hereinafter, examples of a lower connection structure 130, an intermediate connection structure 120, and an upper connection structure 150 will be described with reference to the drawings. Various assemblies including at least one of the lower connection structure 130, the intermediate connection structure 120, and the upper connection structure 150 may be referred to as a “connection structure.”

One or more of first and second lower insulating layers 131 a and 131 b, first and second intermediate insulating layers 121 a and 121 b, and a first upper insulating layer 151 a may hereafter be referred to as an “insulating layer.”

One or more of first and second lower conductive pattern layers 132 a and 132 b, first, second, and third intermediate conductive pattern layers 122 c, 122 b, and 122 a, and a first upper conductive pattern layer 152 a may be referred to as a “conductive pattern layer.”

One or more of first and second lower vias 133 a and 133 b, first and second intermediate vias 132 a and 132 b, and a first upper via 153 a may be referred to as a “via.”

FIG. 1 is a cross-sectional view of a semiconductor package 100 according to embodiments of the inventive concept.

Referring to FIG. 1 , the semiconductor package 100 may include the lower connection structure 130, a first semiconductor chip 110 on an upper surface of the lower connection structure 130, the intermediate connection structure 120 on the upper surface of the lower connection structure 130, a first sealing layer 140 covering at least an upper surface of the first semiconductor chip 110, and the upper connection structure 150 on the first sealing layer 140. According to some embodiments of the inventive concept, the semiconductor package 100 may further include an upper protective layer 160 on the upper connection structure 150. According to some embodiments of the inventive concept, the semiconductor package 100 may further include an external connection terminal 170 and/or a capacitor 180 on a lower surface of the lower connection structure 130.

The lower connection structure 130 may be configured to connect the first semiconductor chip 110 to the external connection terminal 170, connect the intermediate connection structure 120 to the first semiconductor chip 110, and connect the intermediate connection structure 120 to the external connection terminal 170. The lower connection structure 130 may include at least one lower insulating layer (e.g., the first and second lower insulating layers 131 a and 131 b), at least one lower conductive pattern layer (e.g., the first and second lower conductive pattern layers 132 a and 132 b), on the at least one lower insulating layer (e.g., the first and second lower insulating layers 131 a and 131 b), and at least one lower via (e.g., the first and second lower vias 133 a and 133 b) in contact with the at least one lower conductive pattern layer (e.g., the first and second lower conductive pattern layers 132 a and 132 b) by penetrating the at least one lower insulating layer (e.g., the first and second lower insulating layers 131 a and 131 b). The at least one lower conductive pattern layer (e.g., the first and second lower conductive pattern layers 132 a and 132 b), and the at least one lower via (e.g., the first and second lower vias 133 a and 133 b) may provide an electrical path connecting the first semiconductor chip 110 to the external connection terminal 170, an electrical path connecting the intermediate connection structure 120 to the first semiconductor chip 110, and an electrical path connecting the intermediate connection structure 120 to the external connection terminal 170. According to some embodiments of the inventive concept, the lower connection structure 130 may further include a lower protective layer 134 and a lower pad 135 on the lower protective layer 134. The lower connection structure 130 may include a redistribution structure or a printed circuit board (PCB).

For example, the lower connection structure 130 may include the first lower insulating layer 131 a on a lower surface of the first semiconductor chip 110 and a lower surface of the intermediate connection structure 120, the first lower conductive pattern layer 132 a on a lower surface of the first lower insulating layer 131 a, the first lower via 133 a in contact with the first lower conductive pattern layer 132 a by penetrating the first lower insulating layer 131 a, the second lower insulating layer 131 b on the lower surface of the first lower insulating layer 131 a and on a lower surface of the first lower conductive pattern layer 132 a, the second lower conductive pattern layer 132 b on a lower surface of the second lower insulating layer 131 b, and the second lower via 133 b penetrating the second lower insulating layer 131 b and extending between the first lower conductive pattern layer 132 a and the second lower conductive pattern layer 132 b. Alternately, the lower connection structure 130 may include more or less than two lower conductive pattern layers. The first lower conductive pattern layer 132 a may be connected to the third intermediate conductive pattern layer 122 a of the intermediate connection structure 120 and a chip pad 112 of the first semiconductor chip 110 through the first lower via 133 a, and the second lower conductive pattern layer 132 b may be connected to the first lower conductive pattern layer 132 a through the second lower via 133 b.

The first and second lower insulating layers 131 a and 131 b may include, for example, an inorganic insulating material, an organic insulating material, or a combination thereof. The inorganic insulating material may include, for example, silicon oxide, silicon nitride, or a combination thereof. The organic insulating material may include, for example, polyimide, epoxy resin, or a combination thereof. The first and second lower conductive pattern layers 132 a and 132 b and the first and second lower vias 133 a and 133 b may include a conductive material which may include, for example, copper (Cu), gold (Au), silver (Ag), nickel (Ni), tungsten (W), aluminum (Al), or a combination thereof. According to some embodiments of the inventive concept, the first and second lower conductive pattern layers 132 a and 132 b and the first and second lower vias 133 a and 133 b may further include a barrier material to prevent the conductive material from diffusing outward therefrom. The barrier material may include, for example, titanium (Ti), tantalum (Ta), titanium nitride (TiN), tantalum nitride (TaN), or a combination thereof.

The lower protective layer 134 may be on the lower surface of the second lower insulating layer 131 b. The lower protective layer 134 may physically and/or chemically protect the lower connection structure 130 from an ambient environment. According to some embodiments of the inventive concept, the lower protective layer 134 may include a composite material. That is, the lower protective layer 134 may include a matrix and a filler inside the matrix. The matrix may include a polymer, and the filler may include silica, titania, or a combination thereof.

The lower pad 135 may be on a lower surface of the lower protective layer 134 and in contact with the second lower conductive pattern layer 132 b by penetrating the lower protective layer 134, so that the lower pad 135 connects the second lower conductive pattern layer 132 b to the external connection terminal 170. The lower pad 135 may include a conductive material which may include, for example, Cu, Au, Ag, Ni, W, Al, or a combination thereof. According to some embodiments of the inventive concept, the lower pad 135 may further include a barrier material to prevent the conductive material from diffusing outward therefrom. The barrier material may include, for example, Ti, Ta, TiN, TaN, or a combination thereof. According to some embodiments of the inventive concept, the lower pad 135 may further include a wetting material to improve wettability between the conductive material and the external connection terminal 170. When the conductive material includes Cu, the wetting material may include Ni, Au, or a combination thereof.

The first semiconductor chip 110 may include a body 111 and the chip pad 112 on a lower surface of the body 111. The body 111 may include a substrate and an integrated circuit on the substrate. A surface of the first semiconductor chip 110, on which the integrated circuit is formed, may be referred to as an active surface, and a surface of the first semiconductor chip 110, opposing the active surface may be referred to as an inactive surface. In FIG. 1 , the active surface of the first semiconductor chip 110 may be the lower surface of the first semiconductor chip 110, and the inactive surface may be the upper surface of the first semiconductor chip 110.

The substrate may include a semiconductor material, e.g., a Group IV semiconductor material, a Group III-V semiconductor material, a Group II-VI semiconductor material, or a combination thereof. The Group IV semiconductor material may include, for example, silicon (Si), germanium (Ge), or a combination thereof. The Group III-V semiconductor material may include, for example, gallium arsenide (GaAs), indium phosphide (InP), gallium phosphide (GaP), indium arsenide (InAs), indium antimonide (InSb), indium gallium arsenide (InGaAs), or a combination thereof. The Group II-VI semiconductor material may include, for example, zinc telluride (ZnTe), cadmium sulfide (CdS), or a combination thereof. The integrated circuit may be any type of integrated circuit including a memory circuit, a logic circuit, or a combination thereof. The memory circuit may include, for example, a dynamic random access memory (DRAM) circuit, a static random access memory (SRAM) circuit, a flash memory circuit, an electrically erasable and programmable read-only memory (EEPROM) circuit, a phase-change random access memory (PRAM) circuit, a magnetic random access memory (MRAM) circuit, a resistive random access memory (RRAM) circuit, or a combination thereof. The logic circuit may include, for example, a central processing unit (CPU) circuit, a graphics processing unit (GPU) circuit, a controller circuit, an application specific integrated circuit (ASIC), an application processor (AP) circuit, or a combination thereof.

The chip pad 112 may be on the lower surface of the first semiconductor chip 110. The chip pad 112 may connect the integrated circuit of the body 111 to the lower connection structure 130. The chip pad 112 of the first semiconductor chip 110 may be electrically connected to the upper connection structure 150 through the lower connection structure 130 and the intermediate connection structure 120. The chip pad 112 may include a conductive material which may include, for example, Cu, Au, Ag, Ni, W, Al, or a combination thereof.

The intermediate connection structure 120 may be between the lower connection structure 130 and the upper connection structure 150, and may be configured to connect the lower connection structure 130 to the upper connection structure 150. The intermediate connection structure 120 may be disposed around (e.g., at least partially surrounding) the first semiconductor chip 110. According to some embodiments of the inventive concept, the intermediate connection structure 120 may include a hole 120H, and the first semiconductor chip 110 may be in the hole 120H of the intermediate connection structure 120. That is, the intermediate connection structure 120 may at least partially encompass the first semiconductor chip 110.

The intermediate connection structure 120 may include at least one intermediate via (e.g., first and second intermediate vias 123 b and 123 a) configured to connect the lower connection structure 130 to the upper connection structure 150. According to some embodiments of the inventive concept, the intermediate connection structure 120 may further include at least one intermediate insulating layer (e.g., first and second intermediate insulating layers 121 b and 121 a) which the at least one intermediate via penetrates. According to some embodiments of the inventive concept, the intermediate connection structure 120 may further include a plurality of intermediate conductive pattern layers (e.g., the first, second, and third intermediate conductive pattern layers 122 c, 122 b, and 122 a) disposed on the at least one intermediate insulating layer (e.g., the first and second intermediate insulating layers 121 b and 121 a) and connected to each other by the at least one intermediate via (e.g., the first and second intermediate vias 123 b and 123 a). The at least one intermediate via (e.g., the first and second intermediate vias 123 b and 123 a) and the plurality of intermediate conductive pattern layers (e.g., the first, second, and third intermediate conductive pattern layers 122 c, 122 b, and 122 a) may provide an electrical path connecting the lower connection structure 130 to the upper connection structure 150.

For example, the intermediate connection structure 120 may include the first intermediate insulating layer 121 b above an upper layer of the lower connection structure 130, the first intermediate conductive pattern layer 122 c on an upper layer of the first intermediate insulating layer 121 b and in contact with the first upper via 153 a, the first intermediate via 123 b in contact with the first intermediate conductive pattern layer 122 c by penetrating the first intermediate insulating layer 121 b, the second intermediate insulating layer 121 a between the lower connection structure 130 and the first intermediate insulating layer 121 b, the second intermediate conductive pattern layer 122 b between the second intermediate insulating layer 121 a and the first intermediate insulating layer 121 b and in contact with the first intermediate via 123 b, the second intermediate via 123 a in contact with the second intermediate conductive pattern layer 122 b by penetrating the second intermediate insulating layer 121 a, and the third intermediate conductive pattern layer 122 a between the lower connection structure 130 and the second intermediate insulating layer 121 a and in contact with the second intermediate via 123 a. Alternately, the intermediate connection structure 120 may include more or less than three conductive pattern layers. The second intermediate via 123 a may connect the third intermediate conductive pattern layer 122 a to the second intermediate conductive pattern layer 122 b, and the first intermediate via 123 b may connect the second intermediate conductive pattern layer 122 b to the first intermediate conductive pattern layer 122 c. The third intermediate conductive pattern layer 122 a may be in contact with the first lower via 133 a of the lower connection structure 130, and the first intermediate conductive pattern layer 122 c may be in contact with the first upper via 153 a of the upper connection structure 150.

According to some embodiments of the inventive concept, a height H2 from the upper surface of the lower connection structure 130 to an upper surface of the first intermediate conductive pattern layer 122 c may be greater than a height H3 from the upper surface of the lower connection structure 130 to an upper surface of the first intermediate insulating layer 121 b. The height H2 from the upper surface of the lower connection structure 130 to an upper surface of the first intermediate conductive pattern layer 122 c may correspond to a maximum height from the upper surface of the lower connection structure 130 to an upper surface of the intermediate connection structure 120.

The first and second intermediate insulating layers 121 b and 121 a may include an insulating material. The insulating material may include a thermosetting resin such as an epoxy resin, a thermoplastic resin such as polyimide, or an insulating material (e.g., a prepreg, an Ajinomoto build-up film (ABF), FR-4, bismaleimide triazine (BT), or the like, in which resin is impregnated into a core material such as an inorganic filler and/or a glass fiber (a glass cloth or a glass fabric)). The first, second, and third intermediate conductive pattern layers 122 c, 122 b, and 122 a and the first and second intermediate vias 123 b and 123 a may include a conductive material (e.g., Cu, Au, Ag, Ni, W, Al, or a combination thereof). According to some embodiments of the inventive concept, the first, second, and third intermediate conductive pattern layers 122 c, 122 b, and 122 a and the first and second intermediate vias 123 b and 123 a may further include a barrier material (e.g., Ti, Ta, TiN, TaN, or a combination thereof) that prevents the conductive material from diffusing outward.

The first sealing layer 140 may expose the intermediate connection structure 120 while covering the upper surface of the first semiconductor chip 110. The first sealing layer 140 may at least partially fill a space between the first semiconductor chip 110 and the upper connection structure 150. According to some embodiments of the inventive concept, the first sealing layer 140 may further at least partially fill a space between the intermediate connection structure 120 and the first semiconductor chip 110. According to some embodiments of the inventive concept, the first sealing layer 140 may further at least partially fill in a space between the lower connection structure 130 and the first semiconductor chip 110. Where certain embodiments of the inventive concept in which the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the first intermediate conductive pattern layer 122 c is greater than the height H3 from the upper surface of the lower connection structure 130 to the upper surface of the first intermediate insulating layer 121 b, the first sealing layer 140 may further at least partially fill a space between the upper surface of the first intermediate insulating layer 121 b and a lower surface of the first upper insulating layer 151 a.

A height H1 from the upper surface of the lower connection structure 130 to an upper surface of the first sealing layer 140 may be less than the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the intermediate connection structure 120. That is, the height H1 from the upper surface of the lower connection structure 130 to the upper surface of the first sealing layer 140 may be less than the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the first intermediate conductive pattern layer 122 c. In other words, the upper surface of the intermediate connection structure 120 (e.g., the upper surface of the first intermediate conductive pattern layer 122 c) may extend or protrude upward from the upper surface of the first sealing layer 140.

The first sealing layer 140 may not contact with the upper surface of the first intermediate conductive pattern layer 122 c. In some embodiment in which the height H1 from the upper surface of the lower connection structure 130 to the upper surface of the first sealing layer 140 is greater than a height H3 from the upper surface of the lower connection structure 130 to the upper surface of the first intermediate insulating layer 121 b, the first sealing layer 140 may contact a side surface of the first intermediate conductive pattern layer 122 c. Alternately, in some embodiment in which the height H1 from the upper surface of the lower connection structure 130 to the upper surface of the first sealing layer 140 is less than or equal to the height H3 from the upper surface of the lower connection structure 130 to the upper surface of the first intermediate insulating layer 121 b, the first sealing layer 140 may not contact the side surface of the first intermediate conductive pattern layer 122 c.

The first sealing layer 140 may include, for example, a thermosetting resin such as an epoxy resin or a thermoplastic resin such as polyimide. Alternatively, the first sealing layer 140 may include a molding material such as an epoxy mold compound (EMC) or a photosensitive material such as a photo-imageable encapsulant (PIE). According to some embodiments of the inventive concept, the first sealing layer 140 may include a composite material including a matrix and a filler inside the matrix. The matrix may include a polymer, and the filler may include silica, titania, or a combination thereof.

The upper connection structure 150 may be configured to be connected to the intermediate connection structure 120. The upper connection structure 150 may include the first upper insulating layer 151 a on an upper surface of the first sealing layer 140, the first upper conductive pattern layer 152 a on an upper surface of the first upper insulating layer 151 a, and the first upper via 153 a penetrating the first upper insulating layer 151 a and extending between the first upper conductive pattern layer 152 a and the first intermediate conductive pattern layer 122 c of the intermediate connection structure 120. The upper connection structure 150 may be a redistribution structure. According to some embodiments of the inventive concept, the first upper via 153 a may directly electrically connect the first upper conductive pattern layer 152 a to the first intermediate conductive pattern layer 122 c of the intermediate connection structure 120. That is, an electrical path between the first upper conductive pattern layer 152 a to the first intermediate conductive pattern layer 122 c of the intermediate connection structure 120 may be formed only by the first upper via 153 a. According to some embodiments of the inventive concept, a length ‘L’ from a lower end of the first upper via 153 a to an upper end of the first upper via 153 a may be less than a maximum thickness ‘T’ of the first upper insulating layer 151 a.

The first upper conductive pattern layer 152 a and the first upper via 153 a may include a conductive material (e.g., Cu, Au, Ag, Ni, W, Al, or a combination thereof). According to some embodiments of the inventive concept, the first upper conductive pattern layer 152 a and the first upper via 153 a may further include a barrier material (e.g., Ti, Ta, TiN, TaN, or a combination thereof) to prevent the conductive material from diffusing outward. According to some embodiments of the inventive concept, the first upper conductive pattern layer 152 a may further include a wetting material to improve wettability between the conductive material and another connection member (e.g., an inter-package connection member 300, as illustrated in the example of FIG. 6 ). When the conductive material includes Cu, the wetting material may include Ni, Au, or a combination thereof.

A chemical composition of the first upper insulating layer 151 a may differ from a chemical composition of the first sealing layer 140. For example, the first sealing layer 140 may include a material (e.g., a build-up film such as an ABF) that is easy to in-fill between the intermediate connection structure 120 and the first semiconductor chip 110. The first sealing layer 140 formed using the build-up film may include a composite material such as a matrix and a filler inside the matrix. To easily perform a process of etching the first sealing layer 140 in an operation of exposing the intermediate connection structure 120, a nanofiller having a one-directional dimension of 1 μm or less may be used as the filler. Moreover, the first upper insulating layer 151 a may include a material (e.g., a photosensitive insulating material (a photo-imageable dielectric (PID)), that will easily form a fine pattern. The first upper insulating layer 151 a including the photosensitive insulating material may not include the filler. Because the first upper insulating layer 151 a does not include the filler, contamination of manufacturing equipment (e.g., a sputtering chamber) by the filler may be prevented when the first upper conductive pattern layer 152 a and the first upper via 153 a are formed on the first upper insulating layer 151 a by using (e.g.) sputtering.

The upper protective layer 160 may cover the first upper insulating layer 151 a and expose at least a portion of the first upper conductive pattern layer 152 a. The upper protective layer 160 may include (e.g.) a solder resist.

The external connection terminal 170 may be on a lower surface of the lower pad 135 of the lower connection structure 130. The external connection terminal 170 may include a conductive material (e.g., tin (Sn), lead (Pb), Ag, Cu, or a combination thereof). The external connection terminal 170 may include a solder ball. The external connection terminal 170 may connect the semiconductor package 100 to a circuit board, another semiconductor package, an interposer, or a combination thereof. The capacitor 180 may be used to stabilize power, and may be connected to the lower connection structure 130 through the lower pad 135 of the lower connection structure 130.

FIG. 2 is a cross-sectional view of a semiconductor package 100A according to embodiments of the inventive concept. Hereinafter, difference(s) between the semiconductor package 100 of FIG. 1 and the semiconductor package 100A of FIG. 2 will be described.

Referring to FIG. 2 , a height H1 s from the upper surface of the lower connection structure 130 to an upper surface of a first sealing layer 140 s may be the same as the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the intermediate connection structure 120 (e.g., the upper surface of the first intermediate conductive pattern layer 122 c). That is, the upper surface of the intermediate connection structure 120 (e.g., the upper surface of the first intermediate conductive pattern layer 122 c) may be coplanar with the upper surface of the first sealing layer 140 s. In other words, the length ‘L’ from the lower end of the first upper via 153 a to the upper end of the first upper via 153 a may be the same as a maximum thickness ‘Ts’ of a first upper insulating layer 151 s. According to some embodiments of the inventive concept, the thickness ‘Ts’ of the first upper insulating layer 151 s may be substantially uniform.

FIG. 3 is a cross-sectional view of a semiconductor package 100B according to embodiments of the inventive concept. Hereinafter, difference(s) between the semiconductor package 100 of FIG. 1 and the semiconductor package 100B of FIG. 3 will be described.

Referring to FIG. 3 , an intermediate connection structure 120 p may include a pillar penetrating a lower part of the first upper insulating layer 151 a and the first sealing layer 140 and extending from the upper surface of the lower connection structure 130 to a lower surface of the first upper via 153 a of the upper connection structure 150. The pillar may include a conductive material (e.g., Cu, Au, Ag, Ni, W, Al, or a combination thereof).

FIG. 4 is a cross-sectional view of a semiconductor package 100C according to embodiments of the inventive concept. Hereinafter, difference(s) between the semiconductor package 100 of FIG. 1 and the semiconductor package 100C of FIG. 4 will be described.

Referring to FIG. 4 , the upper connection structure 150 may include a plurality of conductive pattern layers (e.g., the first conductive pattern layer 152 a and a second upper conductive pattern layer 152 b). For example, the upper connection structure 150 may further include a second upper insulating layer 151 b on the upper surface of the first upper insulating layer 151 a and an upper surface of the first upper conductive pattern layer 152 a, the second upper conductive pattern layer 152 b on an upper surface of the second upper insulating layer 151 b, and a second upper via 153 b penetrating the second upper insulating layer 151 b and extending between the second upper conductive pattern layer 152 b and the first upper conductive pattern layer 152 a. The upper protective layer 160 may cover the second upper insulating layer 151 b and expose at least a portion of the second upper conductive pattern layer 152 b. According to some embodiments of the inventive concept, the upper connection structure 150 may further include additional upper insulating layers, upper conductive patterns, and upper vias.

According to some embodiments of the inventive concept, at least a portion of the first upper conductive pattern layer 152 a is electrically grounded and at least a portion of the second upper conductive pattern layer 152 b may be configured to transmit various signal(s). Furthermore, the first upper conductive pattern layer 152 a may be mainly used for grounding, and the second upper conductive pattern layer 152 b may be mainly used for signal transmission. By grounding at least a portion of the first upper conductive pattern layer 152 a, characteristics (e.g., signal integrity) of signal(s) transmitted through the second upper conductive pattern layer 152 b and power characteristics (e.g., power integrity) may be improved.

FIG. 5 is a cross-sectional view of a semiconductor package 100D according to embodiments of the inventive concept. Hereinafter, difference(s) between the semiconductor package 100 of FIG. 1 and the semiconductor package 100D of FIG. 5 will be described.

Referring to FIG. 5 , the upper connection structure 150 may include a plurality of conductive pattern layers (e.g., the first conductive pattern layer 152 a and a third upper conductive pattern layer 152 c). For example, the upper connection structure 150 may further include the third upper conductive pattern layer 152 c between a first sealing layer 140 v and a first upper insulating layer 151 v, and a third upper via 153 c penetrating the first upper insulating layer 151 v and extending between the first upper conductive pattern layer 152 a and the third upper conductive pattern layer 152 c. According to some embodiments of the inventive concept, the upper connection structure 150 may further include additional upper insulating layers, upper conductive patterns, and upper vias.

According to some embodiments of the inventive concept, at least a portion of the third upper conductive pattern layer 152 c may be electrically grounded and at least a portion of the first upper conductive pattern layer 152 a may be configured to transmit various signal(s). That is, the third upper conductive pattern layer 152 c may be mainly used for grounding, and the first upper conductive pattern layer 152 a may be mainly used for signal transmission. By grounding at least a portion of the third upper conductive pattern layer 152 c, characteristics (e.g., signal integrity) of a signal transmitted through the first upper conductive pattern layer 152 a and power characteristics (e.g., power integrity) may be improved.

According to some embodiments of the inventive concept, the upper connection structure 150 may not include a via directly connecting the third upper conductive pattern layer 152 c to the intermediate connection structure 120. That is, the upper connection structure 150 may not include a via extending from the third upper conductive pattern layer 152 c to the first intermediate conductive pattern layer 122 c of the intermediate connection structure 120. According to some embodiments of the inventive concept, the third upper conductive pattern layer 152 c may be indirectly connected to the intermediate connection structure 120 through the third upper via 153 c, the first upper conductive pattern layer 152 a, and the first upper via 153 a. Because the upper connection structure 150 does not include a via on a lower surface of the third upper conductive pattern layer 152 c,h the third upper conductive pattern layer 152 c does not have to be thick to fill in a via on the lower surface of third upper conductive pattern layer 152 c to simultaneously produce the third upper conductive pattern layer 152 c and the via. Therefore, a thickness of the third upper conductive pattern layer 152 c may be relatively less than, for example, a thickness of the first upper conductive pattern layer 152 a simultaneously formed together with the first upper via 153 a and the third upper via 153 c. That is, a thickness ‘Tc’ of the third upper conductive pattern layer 152 c may be less than a thickness ‘Ta’ of the first upper conductive pattern layer 152 a. Accordingly, the overall thickness of the semiconductor package 100D may be reduced.

According to some embodiments of the inventive concept, an upper surface of the first sealing layer 140 v may not be flat. For example, a height H1 v from the upper surface of the lower connection structure 130 to a part of the upper surface of the first sealing layer 140 v, which is covered by the third upper conductive pattern layer 152 c, may be greater than a height H4 v from the upper surface of the lower connection structure 130 to a part of the upper surface of the first sealing layer 140 v, which is not covered by the third upper conductive pattern layer 152 c. The height H1 v from the upper surface of the lower connection structure 130 to the part of the upper surface of the first sealing layer 140 v, which is covered by the third upper conductive pattern layer 152 c, may correspond to a maximum height from the upper surface of the lower connection structure 130 to the upper surface of the first sealing layer 140 v, and the height H4 v from the upper surface of the lower connection structure 130 to the part of the upper surface of the first sealing layer 140 v, which is not covered by the third upper conductive pattern layer 152 c, may correspond to a minimum height from the upper surface of the lower connection structure 130 to the upper surface of the first sealing layer 140 v. According to some embodiments of the inventive concept, the height H1 v from the upper surface of the lower connection structure 130 to the part of the upper surface of the first sealing layer 140 v, which is covered by the third upper conductive pattern layer 152 c, may be greater than the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the intermediate connection structure 120 (e.g., the upper surface of the first intermediate conductive pattern layer 122 c). However, the height H4 v from the upper surface of the lower connection structure 130 to the part of the upper surface of the first sealing layer 140 v, which is not covered by the third upper conductive pattern layer 152 c, may be less than the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the intermediate connection structure 120 (e.g., the upper surface of the first intermediate conductive pattern layer 122 c).

According to some embodiments of the inventive concept, a thickness of the first upper insulating layer 151 v may not be uniform. For example, a thickness T1 v of a part of the first upper insulating layer 151 v on the third upper conductive pattern layer 152 c may be less than a thickness T4 v of the remaining part of the first upper insulating layer 151 v. The thickness T1 v of the part of the first upper insulating layer 151 v on the third upper conductive pattern layer 152 c may correspond to a minimum thickness of the first upper insulating layer 151 v, and the thickness T4 v of the remaining part of the first upper insulating layer 151 v may correspond to a maximum thickness of the first upper insulating layer 151 v. According to some embodiments of the inventive concept, the thickness T1 v of the part of the first upper insulating layer 151 v on the third upper conductive pattern layer 152 c may be less than a length Lv1 from the lower end of the first upper via 153 a to the upper end of the first upper via 153 a and the same as a length Lv2 from a lower end of the third upper via 153 c to an upper end of the third upper via 153 c. According to some embodiments of the inventive concept, the thickness T4 v of the remaining part of the first upper insulating layer 151 v may be greater than the length Lv2 from the lower end of the third upper via 153 c to the upper end of the third upper via 153 c and greater than or equal to the length Lv1 from the lower end of the first upper via 153 a to the upper end of the first upper via 153 a. Still, the length Lv1 from the lower end of the first upper via 153 a to the upper end of the first upper via 153 a may be less than or equal to the maximum thickness T4 v of the first upper insulating layer 151 v. In addition, still, the upper surface of the intermediate connection structure 120, e.g., the upper surface of the first intermediate conductive pattern layer 122 c, may protrude upward from the upper surface of the first sealing layer 140 v.

FIG. 6 is a cross-sectional view of a semiconductor package 1000 according to embodiments of the inventive concept.

Referring to FIG. 6 , the semiconductor package 1000 may include a lower semiconductor package P1, an upper semiconductor package P2 on the lower semiconductor package P1, and an inter-package connection member 300 between the lower semiconductor package P1 and the upper semiconductor package P2. That is, the semiconductor package 1000 may be a package on package (POP) type. The lower semiconductor package P1 may be one of the semiconductor package 100 of FIG. 1 , the semiconductor package 100A of FIG. 2 , the semiconductor package 100B of FIG. 3 , the semiconductor package 100C of FIG. 4 , and the semiconductor package 100D of FIG. 5 .

The upper semiconductor package P2 may include a connection structure 230, a second semiconductor chip 210 on the connection structure 230, and a second sealing layer 240 covering the connection structure 230 and the second semiconductor chip 210. According to some embodiments of the inventive concept, the upper semiconductor package P2 may include a plurality of second semiconductor chips 210 stacked on the connection structure 230.

The connection structure 230 may include, for example, an insulating layer 231, an upper conductive pattern layer 232 b on an upper surface of the insulating layer 231, a lower conductive pattern layer 232 a on a lower surface of the insulating layer 231, and a via 233 connecting the upper conductive pattern layer 232 b to the lower conductive pattern layer 232 a by penetrating the insulating layer 231 and extending between the upper conductive pattern layer 232 b and the lower conductive pattern layer 232 a. The connection structure 230 may include a PCB or a redistribution structure. The insulating layer 231 may include flame retardant 4 (FR4), tetrafunctional epoxy, polyphenylene ether, epoxy/polyphenylene oxide, bismaleimide triazine (BT), Thermount, cyanate ester, polyimide, or a combination thereof. The upper conductive pattern layer 232 b, the lower conductive pattern layer 232 a, and the via 233 may include a conductive material (e.g., Cu, Au, Ag, Ni, W, Al, or a combination thereof).

The second semiconductor chip 210 may include a body 211 and a chip pad 212 on an upper surface of the body 211. The body 211 may include a substrate and an integrated circuit, and the integrated circuit may be on an upper surface of the second semiconductor chip 210. That is, an active surface of the second semiconductor chip 210 may be the upper surface of the second semiconductor chip 210. The second semiconductor chip 210 may be connected to the upper conductive pattern layer 232 b of the connection structure 230 through a wire. According to some embodiments of the inventive concept, the chip pad 212 of the second semiconductor chip 210 may be on a lower surface of the second semiconductor chip 210, and the integrated circuit of the body 211 of the second semiconductor chip 210 may be on the lower surface of the second semiconductor chip 210. That is, an active surface of the second semiconductor chip 210 may be the lower surface of the second semiconductor chip 210. In this case, the second semiconductor chip 210 may be connected to the upper conductive pattern layer 232 b of the connection structure 230 through a bump or pillar.

According to some embodiments of the inventive concept, the integrated circuit of the body 111 of the first semiconductor chip 110 of the lower semiconductor package P1 may include a logic circuit, and the integrated circuit of the body 211 of the second semiconductor chip 210 of the upper semiconductor package P2 may include a memory circuit. The second sealing layer 240 may include a thermosetting resin such as an epoxy resin or a thermoplastic resin such as polyimide. Alternatively, the second sealing layer 240 may include a molding material such as an EMC or a photosensitive material such as a PIE.

The inter-package connection member 300 may be between the lower conductive pattern layer 232 a of the connection structure 230 of the upper semiconductor package P2 and the first upper conductive pattern layer 152 a of the upper connection structure 150 of the lower semiconductor package P1 and connect the lower conductive pattern layer 232 a of the connection structure 230 of the upper semiconductor package P2 to the first upper conductive pattern layer 152 a of the upper connection structure 150 of the lower semiconductor package P1. The upper protective layer 160 of the lower semiconductor package P1 may expose a part of the first upper conductive pattern layer 152 a in contact with the inter-package connection member 300 and cover the remaining part of the first upper conductive pattern layer 152 a. The inter-package connection member 300 may include a conductive material including (e.g., Sn, Pb, Ag, Cu, or a combination thereof). The inter-package connection member 300 may include a solder ball.

FIGS. 7A, 7B, 7C, 7D, 7E and 7F (inclusively, “FIGS. 7A to 7F”) are related, cross-sectional views that further illustrate a method of manufacturing a semiconductor package according to embodiments of the inventive concept.

Referring to FIG. 7A, the hole 120H penetrating the intermediate connection structure 120 is formed in the intermediate connection structure 120. The hole 120H of the intermediate connection structure 120 may be formed by, for example, mechanical drilling, laser drilling, sand blast, dry etching, and/or wet etching. Next, a first support structure S1 may be attached to the lower surface of the intermediate connection structure 120. The first support structure S1 may include any material (e.g., an adhesive film) which may fix the first support structure S1. The adhesive film may be a thermosetting adhesive film, of which an adhesive force is weakened by heat treatment, or an ultraviolet-curing adhesive film, of which an adhesive force is weakened by ultraviolet irradiation. Next, the first semiconductor chip 110 is disposed in the hole 120H of the intermediate connection structure 120 so that the chip pad 112 of the first semiconductor chip 110 faces the first support structure S1, and the first semiconductor chip 110 may be attached to the first support structure S1.

Referring to FIG. 7B, the first sealing layer 140 covering the first semiconductor chip 110 and the intermediate connection structure 120 may be formed. Those skilled in the art will appreciate that the first sealing layer 140 may be formed using known method(s). For example, the first sealing layer 140 may be formed by laminating a sealing material (e.g., a build-up film) on the upper surface of the first semiconductor chip 110 and the upper surface of the intermediate connection structure 120. Alternatively, the first sealing layer 140 may be formed by coating a liquid sealing material on the first support structure S1, the first semiconductor chip 110, and the intermediate connection structure 120 and then curing the sealing material. To easily perform later an operation of etching an upper part of the first sealing layer 140 to expose the upper surface of the intermediate connection structure 120 (e.g., the upper surface of the first intermediate conductive pattern layer 122 c) a thickness ‘TL’ of the first sealing layer 140 on the upper surface of the intermediate connection structure 120 (e.g., the upper surface of the first intermediate conductive pattern layer 122 c) is preferably, about 5 μm or less. In order to form the desired thickness ‘TL’ of the first sealing layer 140 on the upper surface of the first intermediate conductive pattern layer 122 c, the size of a filler in the first sealing layer 140 is preferably small (e.g., a nanofiller).

Referring to FIGS. 7B and 7C, the first support structure S1 may be removed from the first semiconductor chip 110 and the intermediate connection structure 120. For example, the first support structure S1 may be removed after weakening the adhesive force of the first support structure S1 by using heat and/or ultraviolet light.

Referring to FIGS. 7B and 7C, a second support structure S2 may be attached onto the first sealing layer 140. Next, the lower connection structure 130 may be formed on the lower surface of the intermediate connection structure 120 and the lower surface of the first semiconductor chip 110. For example, the first lower insulating layer 131 a may be formed on the lower surface of the intermediate connection structure 120 and the lower surface of the first semiconductor chip 110, the first lower via 133 a and the first lower conductive pattern layer 132 a may be formed on the first lower insulating layer 131 a, the second lower insulating layer 131 b may be formed on the first lower insulating layer 131 a and the first lower conductive pattern layer 132 a, the second lower via 133 b and the second lower conductive pattern layer 132 b may be formed on the second lower insulating layer 131 b, the lower protective layer 134 may be formed on the second lower conductive pattern layer 132 b and the second lower insulating layer 131 b, and the lower pad 135 may be formed on the lower protective layer 134.

Alternately in other embodiments of the inventive concept, the lower connection structure 130 may be first formed on a support structure (not shown), then the intermediate connection structure 120 and the first semiconductor chip 110 may be attached onto the lower connection structure 130, and then the first sealing layer 140 may be formed.

Referring to FIGS. 7C and 7D, the second support structure S2 may be removed from the first sealing layer 140. Next, an upper part of the first sealing layer 140 may be etched to expose the upper surface of the intermediate connection structure 120, e.g., the upper surface of the first intermediate conductive pattern layer 122 c. For example, the first sealing layer 140 may be wet-etched. For example, a known desmear process may be performed to remove residual substances generated when an opening is formed after forming the opening in the first sealing layer 140 by using, for example, laser drilling may be used. The desmear process may include etching the first sealing layer 140 by using (e.g.) a permanganic acid. To ensure the exposure of the intermediate connection structure 120, the first sealing layer 140 may be over-etched. Therefore, the height H1 from the upper surface of the lower connection structure 130 to the upper surface of the first sealing layer 140 may be less than the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the intermediate connection structure 120 (e.g., the upper surface of the first intermediate conductive pattern layer 122 c). In addition, the upper surface of the intermediate connection structure 120 may extend or protrude upward from the upper surface of the first sealing layer 140. In order to easily etch the first sealing layer 140, the size of a filler in the first sealing layer 140 is preferably small (e.g., a nanofiller).

Referring to FIG. 7E, the first upper insulating layer 151 a having a first opening OP1, through which at least some of the upper surface of the intermediate connection structure 120 (e.g., the upper surface of the first intermediate conductive pattern layer 122 c) is exposed may be formed on the first sealing layer 140 and the intermediate connection structure 120. For example, the first opening OP1, through which the first intermediate conductive pattern layer 122 c of the intermediate connection structure 120 is exposed, may be formed by coating a liquid photosensitive insulating material on the first sealing layer 140 and the intermediate connection structure 120 and selectively exposing to light and developing the photosensitive insulating material. The first opening OP1 of a small size may be easily formed in the first upper insulating layer 151 a by using the photosensitive insulating material.

Referring to FIG. 7F, the first upper via 153 a filling in the first opening OP1 of the first upper insulating layer 151 a and the first upper conductive pattern layer 152 a on the first upper insulating layer 151 a may be formed. For example, the first upper via 153 a and the first upper conductive pattern layer 152 a may be formed by (e.g.) forming a mask pattern on the first upper insulating layer 151 a, forming a seed layer on the first upper insulating layer 151 a by using sputtering, forming a filling layer on the seed layer by using plating, and removing the mask pattern. According to some embodiments of the inventive concept, the forming of the first upper via 153 a and the first upper conductive pattern layer 152 a may further include forming a wetting layer on the filling layer by using, for example, plating. When the first upper insulating layer 151 a does not include a filler, manufacturing equipment (e.g., a sputter chamber) may not be contaminated by the filler when the first upper via 153 a and the first upper conductive pattern layer 152 a are formed (e.g.) during sputtering. Accordingly, the upper connection structure 150 may be completed. Because the height H1 from the upper surface of the lower connection structure 130 to the upper surface of the first sealing layer 140 is less than the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the intermediate connection structure 120, the length ‘L’ from the lower end of the first upper via 153 a to the upper end of the first upper via 153 a may be less than the thickness ‘T’ of the first upper insulating layer 151 a.

Next, referring back to FIG. 1 , the upper protective layer 160 covering the first upper insulating layer 151 a and exposing only a portion of the first upper conductive pattern layer 152 a may be formed. In addition, the external connection terminal 170 and the capacitor 180 may be attached onto the lower pad 135. For example, the external connection terminal 170 attached onto the lower pad 135 of the lower connection structure 130 may be formed by reflowing a solder ball. Accordingly, the semiconductor package 100 of FIG. 1 may be completed.

According to a manufacturing method according to an embodiment of the inventive concept, an upper part of the first sealing layer 140 may be etched to expose the upper surface of the intermediate connection structure 120. Therefore, the overall thickness of the semiconductor package 100 of FIG. 1 may be reduced. In addition, because forming an opening in the first sealing layer 140 to expose the intermediate connection structure 120 may be omitted, a manufacturing cost may be reduced. In addition, because forming an opening in the first sealing layer 140 to expose the intermediate connection structure 120 may be omitted, the first opening OP1 in the first upper insulating layer 151 a does not have to be formed smaller than the opening in the first sealing layer 140 by considering an alignment error between the opening in the first sealing layer 140 and the first opening OP1 in the first upper insulating layer 151 a. This may prevent the formation of a low pattern density of the first opening OP1 formed in the first upper insulating layer 151 a because of the opening in the first sealing layer 140 supposed to be formed larger than the first opening OP1 in the first upper insulating layer 151 a. Accordingly, a degree of integration of the upper connection structure 150 may be improved.

During the etching of the first sealing layer 140, which has been described with reference to FIGS. 7C and 7D, when the etching of the first sealing layer 140 is terminated as soon as the first intermediate conductive pattern layer 122 c of the intermediate connection structure 120 is exposed without over-etching the first sealing layer 140, the height H1 from the upper surface of the lower connection structure 130 to the upper surface of the first sealing layer 140 may be the same as the height H2 from the upper surface of the lower connection structure 130 to the first intermediate conductive pattern layer 122 c. In this case, the semiconductor package 100A of FIG. 2 may be completed.

As described above with reference to FIG. 7F, the semiconductor package 100C of FIG. 4 may be completed by further performing operations of forming the second upper insulating layer 151 b on the first upper conductive pattern layer 152 a and the first upper insulating layer 151 a, forming an opening (not shown) in the second upper insulating layer 151 b, and forming the second upper via 153 b in the opening of the second upper insulating layer 151 b and the second upper conductive pattern layer 152 b on the second upper insulating layer 151 b after forming the first upper conductive pattern layer 152 a.

FIGS. 8A, 8B, 8C, 8D and 8E (inclusively, FIGS. 8A to 8E) are related, cross-sectional views that further illustrate a method of manufacturing a semiconductor package according to embodiments of the inventive concept.

Referring to FIG. 8A, as described above with reference to FIGS. 7A and 7B, the first sealing layer 140 v may be formed on the first semiconductor chip 110 and the intermediate connection structure 120. Next, an upper conductive layer 152 formed on the second support structure S2 may be attached onto the first sealing layer 140 v so that the upper conductive layer 152 is in contact with the first sealing layer 140 v. Next, the lower connection structure 130 may be formed on the lower surface of the intermediate connection structure 120 and the lower surface of the first semiconductor chip 110.

Referring to FIGS. 8A and 8B, the second support structure S2 may be removed while leaving the upper conductive layer 152 on the first sealing layer 140 v. Next, the upper conductive layer 152 may be patterned through etching to form the third upper conductive pattern layer 152 c. Because a via penetrating the first sealing layer 140 v to be in contact with the lower surface of the third upper conductive pattern layer 152 c does not have to be formed simultaneously together with the third upper conductive pattern layer 152 c, it is not necessary to form the third upper conductive pattern layer 152 c to be thick in order to fill in the via in contact with the lower surface of the third upper conductive pattern layer 152 c. Therefore, the third upper conductive pattern layer 152 c may be formed to be thin, and the semiconductor package 100D of FIG. 5 may be formed to be thin. Alternately, according to other embodiments of the inventive concept, the upper conductive layer 152 may not be formed on the second support structure S2, a mask pattern (not shown) may be formed on the first sealing layer 140 v, and the third upper conductive pattern layer 152 c may be formed by using the mask pattern.

Referring to FIGS. 8B and 8C, an upper part of the first sealing layer 140 v may be etched to expose the upper surface of the intermediate connection structure 120, e.g., the upper surface of the first intermediate conductive pattern layer 122 c. For example, the first sealing layer 140 v may be wet-etched For example, a conventional desmear process performed to remove residual substances generated when an opening is formed after forming the opening in the first sealing layer 140 v by using, for example, laser drilling may be used. The desmear process may include (e.g.) a permanganic acid. Because the third upper conductive pattern layer 152 c may function as an etching mask, a part of the first sealing layer 140 v covered by the third upper conductive pattern layer 152 c may not be etched. Therefore, the height H4 v from the upper surface of the lower connection structure 130 to a part of the upper surface of the first sealing layer 140 v, which is not covered by the third upper conductive pattern layer 152 c, may be less than the height H1 v from the upper surface of the lower connection structure 130 to the part of the upper surface of the first sealing layer 140 v, which is covered by the third upper conductive pattern layer 152 c.

The height H1 v from the upper surface of the lower connection structure 130 to the part of the upper surface of the first sealing layer 140 v, which is covered by the third upper conductive pattern layer 152 c, may be greater than the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the first intermediate conductive pattern layer 122 c (e.g., the upper surface of the first intermediate conductive pattern layer 122 c). However, to expose the upper surface of the first intermediate conductive pattern layer 122 c (e.g., the upper surface of the first intermediate conductive pattern layer 122 c), the height H4 v from the upper surface of the lower connection structure 130 to the part of the upper surface of the first sealing layer 140 v, which is not covered by the third upper conductive pattern layer 152 c, may be less than or equal to the height H2 from the upper surface of the lower connection structure 130 to the upper surface of the first intermediate conductive pattern layer 122 c (e.g., the upper surface of the first intermediate conductive pattern layer 122 c).

Referring to FIG. 8D, the first upper insulating layer 151 v having the first opening OP1, through which the upper surface of the intermediate connection structure 120, e.g., the upper surface of the first intermediate conductive pattern layer 122 c, is exposed, and a second opening OP2, through which the upper surface of the third upper conductive pattern layer 152 c is exposed, may be formed For example, the first opening OP1 and the second opening OP2 may be formed by coating a liquid photosensitive insulating material on the first sealing layer 140 v and the intermediate connection structure 120 and selectively exposing to light and developing the photosensitive insulating material.

Referring to FIG. 8E, the first upper via 153 a filling in the first opening OP1 of the first upper insulating layer 151 a, the third upper via 153 c filling in the second opening OP2 of the first upper insulating layer 151 a, and the first upper conductive pattern layer 152 a on the first upper insulating layer 151 a may be formed. For example, the first upper via 153 a, the third upper via 153 c, and the first upper conductive pattern layer 152 a may be formed by forming a mask pattern (not shown) on the first upper insulating layer 151 v, forming a seed layer on the first upper insulating layer 151 v by using sputtering, forming a filling layer on the seed layer by using plating, and removing the mask pattern. According to some embodiments of the inventive concept, the forming of the first upper via 153 a, the third upper via 153 c, and the first upper conductive pattern layer 152 a may further include forming a wetting layer on the filling layer by using, for example, plating.

Next, as described above with reference to FIG. 1 , the upper protective layer 160 may be formed on the first upper conductive pattern layer 152 a and the first upper insulating layer 151 v, and the external connection terminal 170 and the capacitor 180 may be attached to the lower connection structure 130. Accordingly, the semiconductor package 100D of FIG. 5 may be completed.

Referring to FIG. 6 , the upper semiconductor package P2 may be formed by attaching the second semiconductor chip 210 onto the connection structure 230 and forming the second sealing layer 240 covering the connection structure 230 and the second semiconductor chip 210. In addition, the lower semiconductor package P1 may be manufactured according to the method of FIGS. 7A to 7F or the method of FIGS. 8A to 8E. The inter-package connection member 300 may be attached between the lower conductive pattern layer 232 a of the connection structure 230 of the upper semiconductor package P2 and the first upper conductive pattern layer 152 a of the upper connection structure 150. For example, the inter-package connection member 300 may be formed by reflowing a solder ball. Accordingly, the semiconductor package 1000 of FIG. 6 may be completed.

While the inventive concept has been particularly shown and described with reference to embodiments thereof, it will be understood that various changes in form and details may be made therein without departing from the spirit and scope of the following claims. 

What is claimed is:
 1. A semiconductor package comprising: a lower connection structure including a lower insulating layer; a semiconductor chip including a body on the lower connection structure; a sealing layer covering the lower connection structure and the semiconductor chip; an upper connection structure including an upper insulating layer on an upper surface of the sealing layer, an upper conductive pattern layer on an upper surface of the upper insulating layer, and an upper via penetrating an upper part of the upper insulating layer and connecting the first upper conductive pattern layer, and an intermediate connection structure penetrating the sealing layer and a lower part of the upper insulating layer, the intermediate connection structure connecting between the upper conductive pattern layer and the lower connection structure, wherein a lower surface of the intermediate connection structure and an upper surface of the lower insulating layer are located on the same vertical level, the lower surface of the intermediate connection structure is located at a lower vertical level than a lower surface of the body of the semiconductor chip, and an upper surface of the intermediate connection structure is located at a higher vertical level than an upper surface of the body of the semiconductor chip.
 2. The semiconductor package of claim 1, wherein the upper conductive pattern layer directly connects to the intermediate connection structure.
 3. The semiconductor package of claim 1, wherein an upper surface of the intermediate connection structure protrudes upward from the upper surface of the sealing layer.
 4. The semiconductor package of claim 1, wherein the upper insulating layer contacts a portion of an upper surface and a portion of a side surface of the intermediate connection structure.
 5. The semiconductor package of claim 1, wherein a lower surface of the sealing layer and a lower surface of the intermediate connection structure are located on the same vertical level.
 6. The semiconductor package of claim 1, wherein the lower connection structure further includes a lower via penetrating the lower insulating layer to connect the intermediate connection structure, and lower pad disposed on a lower surface of the lower insulating layer and connected to the lower via.
 7. The semiconductor package of claim 6, wherein an upper surface of the lower insulating layer is coplanar with an upper surface of the lower via.
 8. The semiconductor package of claim 1, wherein the semiconductor chip comprises a plurality of chip pads on a lower surface of the semiconductor chip.
 9. The semiconductor package of claim 8, wherein the sealing layer fills in a space between the lower connection structure and the semiconductor chip.
 10. A semiconductor package comprising: a lower semiconductor package; an upper semiconductor package on the lower semiconductor package; and an inter-package connection member between the lower semiconductor package and the upper semiconductor package, wherein the lower semiconductor package includes a first connection structure including a lower insulating layer, a first semiconductor chip including a body on the first connection structure, a first sealing layer covering the first connection structure and the first semiconductor chip, a second connection structure on the first sealing layer, and a third connection structure, the second connection structure includes an upper insulating layer on an upper surface of the first sealing layer, an upper conductive pattern layer on an upper surface of the upper insulating layer, and an upper via penetrating an upper part of the upper insulating layer; the third connection structure penetrates a lower part of the upper insulating layer and the first sealing layer, and connects between the upper conductive pattern layer and the first connection structure, a height from the upper surface of the first connection structure to the upper surface of the first sealing layer is less than a height from the upper surface of the first connection structure to an upper surface of the second connection structure, a lower surface of the third connection structure and an upper surface of the lower insulating layer are located on the same vertical level, the lower surface of the third connection structure is located at a lower vertical level than a lower surface of the body of the semiconductor chip, and an upper surface of the third connection structure is located at a higher vertical level than an upper surface of the body of the semiconductor chip.
 11. The semiconductor package of claim 10, wherein a length from the lower end of the second connection structure to the upper end of the second connection structure is greater than to a thickness of the first sealing layer.
 12. The semiconductor package of claim 10, wherein the upper semiconductor package includes a fourth connection structure, a second semiconductor chip on the fourth connection structure, and a second sealing layer on the fourth connection structure and the second semiconductor chip, and the inter-package connection member connects the conductive pattern layer of the third connection structure to the fourth connection structure.
 13. The semiconductor package of claim 10, wherein the upper insulating layer contacts a portion of an upper surface and a side surface of an upper part of the third connection structure.
 14. The semiconductor package of claim 13, wherein the first sealing layer contacts a side surface of a lower part of the third connection structure.
 15. The semiconductor package of claim 10, wherein a lower surface of the sealing layer is coplanar with a lower surface of the third connection structure.
 16. The semiconductor package of claim 10, further comprising: a capacitor on a lower surface of the first connection structure.
 17. The semiconductor package of claim 16, wherein the sealing layer comprises a composite material includes a matrix and a filler in the matrix.
 18. The semiconductor package of claim 17, wherein the upper insulating layer does not include a filler.
 19. A semiconductor package comprising: a lower connection structure including a lower insulating layer, a lower via penetrating the lower insulating layer, and a lower pad disposed on a lower surface of the lower insulating layer and connected to the lower via; an external connection terminal on a lower surface of the lower pad; a semiconductor chip including a body on an upper surface of the lower connection structure; a sealing layer covering an upper surface of the lower connection structure and an upper surface of the semiconductor chip; an upper connection structure including an upper insulating layer on the sealing layer, an upper conductive pattern layer on the upper insulating layer, and an upper via penetrating an upper part of the upper insulating layer and connecting the upper conductive pattern layer, and an intermediate connection structure penetrating the sealing layer and a lower part of the upper insulating layer, the intermediate connection structure connecting between the upper conductive pattern layer and the lower via, wherein an upper surface of the intermediate connection structure is protrudes upward from the upper surface of the sealing layer, wherein the upper insulating layer contacts a portion of an upper surface of the intermediate connection structure and a side surface of an upper part of the intermediate connection structure, wherein a lower surface of the intermediate connection structure and an upper surface of the lower insulating layer are located on the same vertical level, the lower surface of the intermediate connection structure is located at a lower vertical level than a lower surface of the body of the semiconductor chip, and an upper surface of the intermediate connection structure is located at a higher vertical level than an upper surface of the body of the semiconductor chip.
 20. The semiconductor package of claim 19, wherein the sealing layer at least fills between the upper surface of the semiconductor chip and a lower surface of the upper insulating layer. 